High Productivity Multicolumn E-Beam Lithography

"THE PAST IS PROLOGUE TO THE FUTURE"

Personal Note from our Founder Dr. David K. Lam

I am grateful for the opportunities to advance chip making technologies in the semiconductor industry.  From founding Lam Research in 1980 to develop a single-wafer, cassette-to-cassette, digital-controlled plasma etch system — to now leading development of Multibeam’s MEBL platform to deliver a high-productivity, direct-writing maskless system using multiple miniature e-beam columns — I have never been more excited about revolutionizing the future of semiconductor
wafer fabrication.

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