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We provide chipmakers with what they need – hardware, software and services – to produce patterns on silicon through direct-write lithography.

Multibeam Corporation:
Innovating Maskless Semiconductor Lithography

Headquartered in Santa Clara, California, Multibeam engages in the design, manufacture, and sales of multi-column electron-beam lithography (MEBL) systems that enable maskless production of integrated circuits (ICs) with on-chip security, rapid prototyping, heterogeneous chiplet integration, silicon photonics, and other emerging applications.  Multibeam is led by Silicon Valley Engineering Hall of Famer, Dr. David K. Lam.

At the heart of Multibeam technology is an array of miniature e-beam columns that provide a maskless and high-throughput platform for writing nanoscale IC patterns seamlessly across full wafers.  This solves key limitations widely recognized with e-beam lithography, transforming it from a mere R&D curiosity to an incredible fab tool for production.  With MEBL systems, device makers can save on lithography costs, safeguard the IC supply chain, and revolutionize microelectronics manufacturing.


Multibeam is managed by some of the brightest innovators in the Silicon Valley, including Dr. David K. Lam, founder and first CEO of Lam Research.  Join our team today!


Click to learn more about Multibeam Corporation’s latest news and upcoming events.



Click to learn more about Multibeam Corporation’s latest news and upcoming events.