TECHNOLOGY
TECHNOLOGY
Miniature E-Beam Columns
- Multibeam’s miniature column is a game changer
- Revolutionary multicolumn architecture, solves the e-beam productivity challenge
- 5kV beam energy advantage: Higher speed without the intrinsic damage of 50-100kV systems
TECHNOLOGY
TECHNOLOGY
Parallel, Direct-Write
- Columns write independently and in parallel for maximum productivity
- High speed parallel data paths stream a torrent of writing information to each column
- Harmonized spot size, beam current, and precision patterning
Digital Writing System
- Multibeam’s data processing system seamlessly converts GDSII / OASIS files for fully automated wafer patterning
- Direct-write capability offers tremendous flexibility
- Unlocks new applications at advanced nodes that were previously impossible
