Miniature E-Beam Columns

  • Multibeam’s miniature column is a game changer
  • Revolutionary multicolumn architecture, solves the e-beam productivity challenge
  • 5kV beam energy advantage: Higher speed without the intrinsic damage of 50-100kV systems

Parallel, Direct-Write

  • Columns write independently and in parallel for maximum productivity
  • High speed parallel data paths stream a torrent of writing information to each column
  • Harmonized spot size, beam current, and precision patterning

Digital Writing System

  • Multibeam’s data processing system seamlessly converts GDSII / OASIS files for fully automated wafer patterning
  • Direct-write capability offers tremendous flexibility
  • Unlocks new applications at advanced nodes that were previously impossible