TECHNOLOGY
TECHNOLOGY
Miniature E-Beam Columns
- Multibeam’s miniature column is a game changer
- Revolutionary multicolumn architecture, solves the e-beam productivity challenge
- 5kV beam energy advantage: Higher speed without the intrinsic damage of 50-100kV systems
TECHNOLOGY
Multibeam's data preparation system leverages Synopsys CATS software
Synopsys CATS was custom modified for Multibeam, and is fully integrated into Multibeam system software.
Features:
- Both physics-based and model-based corrections included (3D proximity effect, thermal, etc.)
- Designed for use in IC production; customer usability
Handles GDSII, OASIS, MULTIGON formats
Benefits:
- Easier and faster path from chip design to production
- Easy transcription of complex chip design data into machine-readable instructions for e-beams
- Rapid iterations between design feedback and validation
- Fast ramp to production upon design validation
TECHNOLOGY
Parallel, Direct-Write
- Columns write independently and in parallel for maximum productivity
- High speed parallel data paths stream a torrent of writing information to each column
- Harmonized spot size, beam current, and precision patterning
Digital Writing System
- Multibeam’s data processing system seamlessly converts GDSII / OASIS files for fully automated wafer patterning
- Direct-write capability offers tremendous flexibility
- Unlocks new applications at advanced nodes that were previously impossible
