
Recognizing the untapped potential of direct-write maskless lithography, Dr. Lam acquired proprietary e-beam technologies in 2010 and formed Multibeam Corporation. Leveraging a patented miniature e-beam column design, Multibeam developed the industry’s first high-productivity multicolumn e-beam lithography (MEBL) system to achieve rapid prototyping, advanced packaging, unparalleled chip security and IoT chiplet integration among other applications. As founder and first CEO of Lam Research, Dr. Lam led the development of industry’s first single-wafer, cassette-to-cassette, digital-controlled plasma etch system, ushering in the “sub-micron” chip era and launching the highly successful, Fortune 500 company. He was inducted into the Silicon Valley Engineering Hall of Fame in 2013 and received the MOCA Legacy Award from the Museum of Chinese in America in 2022. Dr. Lam holds Sc.D. and M.S. degrees in Chemical Engineering from the Massachusetts Institute of Technology and a B.S. Engineering Physics degree from the University of Toronto.