Multibeam News  
January 2018
Patent enhances precision direct etch
 
November 2017
Multibeam patent improves accuracy
 
September 2017
Dr. David K Lam presented at the
IoT Device Security Summit
 
July 2017
Dr. David K Lam presented at Semicon
 
May 2017
Multibeam Secures $35M Defense Contract to Build E-Beam System
 
November 2016
SST article: Multibeam Patents Direct Deposition and Etch
 
September 2016
eBeam Initiative: Embedding IoT Chip Security using eBeam
 
November 2015
Multibeam Opens New Headquarters
 
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CEBL Solutions
   
 

 

   
 

Multibeam builds arrays of e-beam columns. Each array deploys approximately 100 columns (for 300mm wafers). A wafer is positioned under the array, and all columns pattern the wafer simultaneously. To achieve high throughput, multiple patterning modules are combined into a cluster system. For more details on how CEBL can meet both high-volume and low-volume requirements, see Applications. 

 

   
 

 

   
 

   
       
 
 
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