Multibeam News  
November 2017
Multibeam patent improves accuracy
 
September 2017
Dr. David K Lam presented at the
IoT Device Security Summit
 
July 2017
Dr. David K Lam presented at Semicon
 
May 2017
Multibeam Secures $35M Defense Contract to Build E-Beam System
 
November 2016
SST article: Multibeam Patents Direct Deposition and Etch
 
September 2016
eBeam Initiative: Embedding IoT Chip Security using eBeam
 
November 2015
Multibeam Opens New Headquarters
 
More  
 
 
Resources
   
 

 

   
  Direct Electron Writing (DEW) Tech Talk - 2016
Can the connected world be more secure? Dr. Lam discusses the need to make Internet of Things (IoT) devices more secure and how Multibeam’s DEW technology accomplishes it. Published by the eBeam Initiative.
   
 

 

   
  Complementary E-Beam Lithography (CEBL) Tech Talk - 2014
Published by the eBeam Initiative, this short video explain the “what” and “why” of CEBL.
   
 

 

   
  Charting CEBL's Role in Mainstream Semiconductor Lithography - 2013
David K. Lam
Proc. SPIE 8880, Photomask Technology 2013, 888013

Copyright 2013 SPIE Photomask Technology
   
 

 

   
  E-Beam Lithography Revisited - 2012
David K. Lam
Future Fab International - Issue 42 - July 2012 - Page 55
Copyright 2012 Future Fab International
   
 

 

   
 

Extending Optical Lithography with CEBL - 2011
David K. Lam
Copyright 2011 Multibeam Corporation

   
 

 

   
 

Optimization of E-beam Landing Energy for EBDW - 2011
Enden D. Liu, and Ted Prescop
Copyright 2011 Society of Photo-Optical Instrumentation Engineers

   
       
 

E-Beam to Complement Optical Lithography for 1D Layouts - 2011
David K. Lam, Enden D. Liu, Michael C. Smayling, and Ted Prescop
Copyright 2011 Society of Photo-Optical Instrumentation Engineers

   
       
  Multibeam EBDW as Complementary Lithography - 2010
David K. Lam,
Enden D. Liu, and Ted Prescop
Copyright 2010 Multibeam Corporation
   
       
 
 
  © 2017 Multibeam Corporation. All rights reserved.